Fang Yu, Jiwei Shen, Shujing Lyu, Yue Lu. MAED: Mask assignment encoder decoder solver for multiple patterning layout decomposition. Expert Systems With Applications, April 2025, vol. 268:126309, DOI: 10.1016/j.eswa.2024.126309.

发布者:苏迪发布时间:2026-08-04浏览次数:10